| 01 avr. 2012 | GRANT_AWARD | Master Silicon Carbide Industries, Inc. | 8 548 | — | |
| 01 janv. 2012 | GRANT_AWARD | Master Silicon Carbide Industries, Inc. | 8 548 | — | |
| 07 nov. 2011 | OTHER | Master Silicon Carbide Industries, Inc. | 8 548 | — | |
| 08 août 2011 | OTHER | Master Silicon Carbide Industries, Inc. | 8 548 | — | |
| 01 avr. 2011 | OTHER | Master Silicon Carbide Industries, Inc. | 8 548 | — | |
| 01 janv. 2011 | OTHER | Master Silicon Carbide Industries, Inc. | 8 548 | — | |
| 01 juil. 2010 | OTHER | Master Silicon Carbide Industries, Inc. | 8 548 | — | |
| 01 oct. 2010 | OTHER | Master Silicon Carbide Industries, Inc. | 8 548 | — | |
| 01 avr. 2010 | OTHER | Master Silicon Carbide Industries, Inc. | 8 548 | — | |
| 01 janv. 2010 | OTHER | Master Silicon Carbide Industries, Inc. | 8 548 | — | |
| 01 oct. 2009 | OTHER | Master Silicon Carbide Industries, Inc. | 8 548 | — | |
| 01 avr. 2009 | OTHER | Master Silicon Carbide Industries, Inc. | 8 548 | — | |
| 01 juil. 2009 | OTHER | Master Silicon Carbide Industries, Inc. | 8 548 | — | |
| 01 oct. 2008 | OTHER | Master Silicon Carbide Industries, Inc. | 2 754 | — | |
| 01 janv. 2009 | OTHER | Master Silicon Carbide Industries, Inc. | 8 548 | — | |