| 01 Apr 2012 | GRANT_AWARD | Master Silicon Carbide Industries, Inc. | 8,548 | — | |
| 01 Jan 2012 | GRANT_AWARD | Master Silicon Carbide Industries, Inc. | 8,548 | — | |
| 07 Nov 2011 | OTHER | Master Silicon Carbide Industries, Inc. | 8,548 | — | |
| 08 Aug 2011 | OTHER | Master Silicon Carbide Industries, Inc. | 8,548 | — | |
| 01 Apr 2011 | OTHER | Master Silicon Carbide Industries, Inc. | 8,548 | — | |
| 01 Jan 2011 | OTHER | Master Silicon Carbide Industries, Inc. | 8,548 | — | |
| 01 Jul 2010 | OTHER | Master Silicon Carbide Industries, Inc. | 8,548 | — | |
| 01 Oct 2010 | OTHER | Master Silicon Carbide Industries, Inc. | 8,548 | — | |
| 01 Apr 2010 | OTHER | Master Silicon Carbide Industries, Inc. | 8,548 | — | |
| 01 Jan 2010 | OTHER | Master Silicon Carbide Industries, Inc. | 8,548 | — | |
| 01 Oct 2009 | OTHER | Master Silicon Carbide Industries, Inc. | 8,548 | — | |
| 01 Apr 2009 | OTHER | Master Silicon Carbide Industries, Inc. | 8,548 | — | |
| 01 Jul 2009 | OTHER | Master Silicon Carbide Industries, Inc. | 8,548 | — | |
| 01 Oct 2008 | OTHER | Master Silicon Carbide Industries, Inc. | 2,754 | — | |
| 01 Jan 2009 | OTHER | Master Silicon Carbide Industries, Inc. | 8,548 | — | |